MEMS

Mahalik

  • 出版商: Mc Graw Hill India
  • 出版日期:
  • 售價: $1,020
  • 貴賓價: 9.5$969
  • 語言: 英文
  • 頁數: 477
  • 裝訂: Paperback
  • ISBN: 0070634459
  • ISBN-13: 9780070634459

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New Features:Principles in MEMS and its scope discussed in sequence ? will help the students grasp the basics (Chapter 1) Various fabrication and design processes such as lithography, surface micromachining, bulk micromachining, etching, thin film deposition, doping, wafer bonding are discussed with their methods and techniques in the chapter on Micromachining (Chapter 2 ) Fundamental components used for design of MEMS are discussed in the chapter on Mechanical Sensors and Actuators (Chapter 5) Thermal MEMS such as Thermocouple, RTD, MEMS thermal probe, microhotplate, thermovessels, SMA actuators, U-shaped horizontal and vertical actuator are covered in chapter on Thermal Sensors and Actuators. (Chapter 6) Biomedical and Chemical MEMS with discussions on chemicals used in BioMEMS and devices like DNA Sensors are present in chapter on Micro fluidic Systems. (Chapter 10) Chapter on Performance Indices and Device Array is dedicated to he understanding of micro devices (Chapter 14) Pedagogy : 227 Practice questions 267 Diagrams 45 Design examples

Principles in MEMS and its scope discussed in sequence ? will help the students grasp the basics (Chapter 1) Various fabrication and design processes such as lithography, surface micromachining, bulk micromachining, etching, thin film deposition, doping, wafer bonding are discussed with their methods and techniques in the chapter on Micromachining (Chapter 2 ) Fundamental components used for design of MEMS are discussed in the chapter on Mechanical Sensors and Actuators (Chapter 5) Thermal MEMS such as Thermocouple, RTD, MEMS thermal probe, microhotplate, thermovessels, SMA actuators, U-shaped horizontal and vertical actuator are covered in chapter on Thermal Sensors and Actuators. (Chapter 6) Biomedical and Chemical MEMS with discussions on chemicals used in BioMEMS and devices like DNA Sensors are present in chapter on Micro fluidic Systems. (Chapter 10) Chapter on Performance Indices and Device Array is dedicated to he understanding of micro devices (Chapter 14) Pedagogy : 227 Practice questions 267 Diagrams 45 Design examples

Table of Contents

Preface
Acknowledgement
Chapter 1: Introduction
Chapter 2: Micromachining
Chapter 3: System Modeling and Properties of Material
Chapter 4: Passive Components and Systems
Chapter 5: Mechanical Sensors and Actuators
Chapter 6: Thermal Sensors and Actuators
Chapter 7: Micro-opto-electromechanical Systems
Chapter 8: Magnetic Sensors and Actuators
Chapter 9: Radio Frequency (RF) MEMS
Chapter 10: Microfluidic Systems
Chapter 11: Chemical and Biomedical Microsystems
Chapter 12: CNT and Nanotechnology
Chapter 13: Simulation Based Micro and Nanosystem Design
Chapter 14: Performance Indices and Device Array References
Index