MEMS
Mahalik
- 出版商: McGraw-Hill Education
- 售價: $1,020
- 貴賓價: 9.5 折 $969
- 語言: 英文
- 頁數: 477
- 裝訂: Paperback
- ISBN: 0070634459
- ISBN-13: 9780070634459
下單後立即進貨 (約5~7天)
買這商品的人也買了...
-
PHP + MySQL 快速入門$680$578 -
C++ Primer, 4/e (中文版)$990$891 -
用實例學 ASP.NET 3.5 基礎篇─使用 VB$720$612 -
Oracle 資料庫管理與維護$620$490 -
走出軟體工場$380$323 -
Ubuntu Linux 強效應用$450$383 -
深入淺出 JavaScript 與 Ajax 網頁程式設計$650$507 -
精通 Windows API 函數、介面、程式設計實例$640$506 -
Linux 進化特區－Ubuntu 9.04 從入門到精通$580$522 -
Python 學習手冊 (Learning Python, 3/e)$880$695 -
Visual C++ 2008 教學手冊 (Ivor Horton's Beginning Visual C++ 2008)$800$680 -
精通 JavaScript + jQuery$580$493 -
網路行銷, 3/e$560$199 -
Google Android SDK 開發範例大全$750$593 -
聖殿祭司的 ASP.NET 3.5 專家技術手冊 I 核心功能篇－使用 C#$650$553 -
UML 團隊開發流程與管理$520$411 -
Windows Embedded CE 6.0 程式開發經典 (Programming Windows Embedded CE 6.0 Developer Reference, 4/e)$680$578 -
ASP.NET 3.5 圖表與實務案例模組大全－使用 VC#$750$638 -
Google！Android 手機應用程式設計入門, 2/e$530$419 -
寫給 SA 的 UML / UseCase 實務手冊$580$493 -
ASP.NET 3.5 控制項與元件開發大全$690$538 -
深入淺出網路管理 (Head First Networking)$680$537 -
Linux Shell 程式設計實務$650$514 -
Facebook 與 funP 應用程式設計$520$442 -
USB 規格與理論剖析：含無線 USB 與 USB 3.0$520$494
商品描述
Description
New Features:Principles in MEMS and its scope discussed in sequence ? will help the students grasp the basics (Chapter 1) Various fabrication and design processes such as lithography, surface micromachining, bulk micromachining, etching, thin film deposition, doping, wafer bonding are discussed with their methods and techniques in the chapter on Micromachining (Chapter 2 ) Fundamental components used for design of MEMS are discussed in the chapter on Mechanical Sensors and Actuators (Chapter 5) Thermal MEMS such as Thermocouple, RTD, MEMS thermal probe, microhotplate, thermovessels, SMA actuators, U-shaped horizontal and vertical actuator are covered in chapter on Thermal Sensors and Actuators. (Chapter 6) Biomedical and Chemical MEMS with discussions on chemicals used in BioMEMS and devices like DNA Sensors are present in chapter on Micro fluidic Systems. (Chapter 10) Chapter on Performance Indices and Device Array is dedicated to he understanding of micro devices (Chapter 14) Pedagogy : 227 Practice questions 267 Diagrams 45 Design examples
Principles in MEMS and its scope discussed in sequence ? will help the students grasp the basics (Chapter 1) Various fabrication and design processes such as lithography, surface micromachining, bulk micromachining, etching, thin film deposition, doping, wafer bonding are discussed with their methods and techniques in the chapter on Micromachining (Chapter 2 ) Fundamental components used for design of MEMS are discussed in the chapter on Mechanical Sensors and Actuators (Chapter 5) Thermal MEMS such as Thermocouple, RTD, MEMS thermal probe, microhotplate, thermovessels, SMA actuators, U-shaped horizontal and vertical actuator are covered in chapter on Thermal Sensors and Actuators. (Chapter 6) Biomedical and Chemical MEMS with discussions on chemicals used in BioMEMS and devices like DNA Sensors are present in chapter on Micro fluidic Systems. (Chapter 10) Chapter on Performance Indices and Device Array is dedicated to he understanding of micro devices (Chapter 14) Pedagogy : 227 Practice questions 267 Diagrams 45 Design examples
Table of Contents
Preface
Acknowledgement
Chapter 1: Introduction
Chapter 2: Micromachining
Chapter 3: System Modeling and Properties of Material
Chapter 4: Passive Components and Systems
Chapter 5: Mechanical Sensors and Actuators
Chapter 6: Thermal Sensors and Actuators
Chapter 7: Micro-opto-electromechanical Systems
Chapter 8: Magnetic Sensors and Actuators
Chapter 9: Radio Frequency (RF) MEMS
Chapter 10: Microfluidic Systems
Chapter 11: Chemical and Biomedical Microsystems
Chapter 12: CNT and Nanotechnology
Chapter 13: Simulation Based Micro and Nanosystem Design
Chapter 14: Performance Indices and Device Array References
Index
