EUV Lithography (Hardcover)

Vivek Bakshi

  • 出版商: Wiley
  • 出版日期: 2008-12-01
  • 售價: $5,270
  • 貴賓價: 9.5$5,007
  • 語言: 英文
  • 頁數: 702
  • 裝訂: Hardcover
  • ISBN: 0470471557
  • ISBN-13: 9780470471555
  • 海外代購書籍(需單獨結帳)

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商品描述

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

商品描述(中文翻譯)

EUVL是一個研究熱點領域,本書提供了理解和應用這項技術所需的基礎知識。它收錄了世界領先的EUVL研究人員的貢獻,並提供了從業人員和想要進入這個領域的人所需的所有關鍵信息。