EUV Lithography (Hardcover)

Vivek Bakshi

  • 出版商: Wiley
  • 出版日期: 2008-12-15
  • 售價: $3,123
  • 貴賓價: 9.4$2,950
  • 語言: 英文
  • 頁數: 702
  • 裝訂: Hardcover
  • ISBN: 0470471557
  • ISBN-13: 9780470471555

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商品描述

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.