Nanofabrication: Nanolithography techniques and their applications
暫譯: 奈米製造：奈米光刻技術及其應用
de Teresa, Jose Maria
相關主題
商品描述
A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications.
The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information about the main advantages and drawbacks of each technique in terms of resolution, throughput, number of steps needed and cost etc. At the end of this section, the reader will be able to decide which technique to use for different applications.
The second section explores more specific applications of the nanolithography techniques previously described as well as new techniques and applications. In some cases, the processes described in these chapters involve a combination of several nanolithography techniques. This section is less general but provides the reader with real examples.
Key Features
- Ideally suited for Master/ PhD students, who need a basic understanding of nanolithography techniques and how/where they can be applied
- Includes state-of-the-art information with updated references for researchers and engineers needing to expand or update their knowledge on nanofabrication
- All chapters are written by world leading experts in their respective research areas
- Follows a pedagogical approach; each chapter is expected to provide worked examples, case studies and an end-of-chapter summary
- Includes interactive elements, such as video animations
商品描述(中文翻譯)
一本全面編輯的專著，涵蓋重要且最新的奈米光刻技術及其應用。本書包含了奈米光刻在當今研究和技術中的重要性介紹，並提供其應用的範例。
本書的其餘部分分為兩個部分。第一部分包含最重要且已建立的奈米光刻技術。除了對每種技術的詳細描述外，讀者還可以獲得有關每種技術在解析度、產量、所需步驟數量和成本等方面的主要優勢和缺點的有用資訊。在本部分結尾，讀者將能夠決定在不同應用中使用哪種技術。
第二部分探討先前描述的奈米光刻技術的更具體應用，以及新技術和應用。在某些情況下，本章所描述的過程涉及多種奈米光刻技術的結合。本部分雖然不如前者一般，但為讀者提供了真實的範例。
主要特點：
- 特別適合需要基本了解奈米光刻技術及其應用的碩士/博士生
- 包含最先進的資訊，並提供更新的參考資料，供需要擴展或更新奈米製造知識的研究人員和工程師使用
- 所有章節均由各自研究領域的世界領先專家撰寫
- 採用教學方法；每章預期提供實例、案例研究和章末總結
- 包含互動元素，如視頻動畫
作者簡介
José Maria De Teresa leads the group of Nanofabrication and Advanced Microscopies (NANOMIDAS) at the Institute of Nanoscience and Materials Science of Aragon (CSIC-University of Zaragoza, Spain). He is the coordinator of the Spanish network on nanolithography (NANOLITO) and the FI-SEM (focused ion beam - scanning electron microscopy) area in the Spanish National Facility for Advanced Microscopies. De Teresa is the Board Vice-Chair of the Condensed Matter Division in the European Physical Society. His main research interests are nanofabrication with focused electron and ion beams, magnetic nanostructures, nano-superconductivity and new materials.
作者簡介(中文翻譯)
何塞·瑪麗亞·德·特雷薩（José Maria De Teresa）領導西班牙薩拉戈薩大學（CSIC-University of Zaragoza）納米科學與材料科學研究所的納米製造與先進顯微技術（NANOMIDAS）團隊。他是西班牙納米光刻網絡（NANOLITO）的協調員，以及西班牙國家先進顯微技術設施中的聚焦離子束-掃描電子顯微鏡（FI-SEM）領域的負責人。德·特雷薩是歐洲物理學會凝聚態物質部門的副主席。他的主要研究興趣包括使用聚焦電子束和離子束的納米製造、磁性納米結構、納米超導性以及新材料。
