Nanoscale Standards by Metrological AFM and Other Instruments
暫譯: 以計量原子力顯微鏡及其他儀器進行的納米尺度標準

Misumi, Ichiko

  • 出版商: IOP Publishing Ltd
  • 出版日期: 2021-05-20
  • 售價: $6,790
  • 貴賓價: 9.5$6,451
  • 語言: 英文
  • 頁數: 120
  • 裝訂: Hardcover - also called cloth, retail trade, or trade
  • ISBN: 0750331895
  • ISBN-13: 9780750331890
  • 海外代購書籍(需單獨結帳)

相關主題

商品描述

The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introductory overview of nanometrological standards before proceeding to detail pitch standard, step height, line width, nano particle size, and surface roughness. This book is essential for users making quantitative nanoscale measurements, be that in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications. Here the author provides an approachable understanding and application of the nanoscale standards in a practical context across a range of common nanoscale measurement modalities, including 3D, with particular emphasis on applications to AFM, an exceptional and arguably the most common technique used in nanometrology due to the ease of use and versatility of applications.


Key features


  • Practical guide for users and practitioners
  • Puts nanoscale standards in a practical context.
  • Covers a range of measurement modalities.
  • 2D and 3D measurements.


商品描述(中文翻譯)

本書的目的是幫助半導體檢測設備的使用者和製造商了解用於校準其設備的奈米尺寸標準,以及如何有效地使用這些標準。書中回顧了奈米尺度標準的趨勢和發展,首先介紹奈米計量標準的概述,然後詳細說明間距標準、步高、線寬、奈米顆粒大小和表面粗糙度。本書對於在商業或學術研究環境中進行定量奈米尺度測量的使用者,以及參與工業應用中質量控制的奈米計量工程師來說,都是必不可少的。在這裡,作者提供了對奈米尺度標準的易於理解和應用的實用背景,涵蓋了一系列常見的奈米尺度測量方式,包括3D測量,特別強調了對原子力顯微鏡(AFM)的應用,因為AFM是一種因其易用性和應用的多樣性而被廣泛使用的奈米計量技術。

主要特點

- 為使用者和從業者提供實用指南
- 將奈米尺度標準置於實際背景中
- 涵蓋多種測量方式
- 2D和3D測量