Machine Learning-Based Modelling in Atomic Layer Deposition Processes
暫譯: 基於機器學習的原子層沉積過程建模

本書描述了機器學習建模方法在原子層沉積（Atomic Layer Deposition, ALD）中的應用，並提供有關建模、優化以及預測ALD行為和特性的詳細資訊，以改善過程質量控制。

Oluwatobi Adeleke is a researcher at the Department of Mechanical Engineering Science, University of Johannesburg. He joined the University of Johannesburg in 2019 as a PhD researcher and completed his PhD research in 2022. He also holds a Masters' and Bachelor's degree in Mechanical Engineering from University of Ibadan and Ladoke Akintola University of Technology, respectively. His research interest is in artificial intelligence, soft computing techniques and machine learning, renewable energy, bio-energy. solar cells, waste-to-energy, and systems modeling. He has also made extensive contribution to researches in atomic layer deposition, material science, corrosion inhibition, waste management modelling and optimization and life cycle assessment. He has published articles in reputable journals neural computing and applications, Energy reports, Fuel, renewable energy, biotechnology reports, journal of material research and technology, engineered science and several other journals. He has published a number of book chapters and conference papers in these fields. He is a reviewer for several reputable journals in the field of waste management, soft computing and renewable energy. He was awarded the best PhD researcher in the Department of Mechanical Science, under the faculty of Engineering and Built Environment (FEBE) award of academic excellence, 2021. He is a member of Council for Regulation of Engineering in Nigeria (COREN), Nigeria Society of Engineers (NSE), and American Society of Mechanical Engineers (ASME).

Sina Karimzadeh is a PhD research candidate at the University of Johannesburg. He holds a MSc degree in Mechanical engineering from the University of Johannesburg in 2020. He has been selected as one of the prospective for the chancellors Medal for the most meritorious Masters study for 2020. His current research interest focuses on the development of Li-ion battery active components and interface engineering by using atomic layer deposition (ALD) technique. He has also been involved in a number of projects including Hydrogen Storage, Hydrogen Generation, Thin Films and Nanotechnology, Drug Delivery, Heat Transfer, Water Purification Membrane and Computational modelling and simulation. He has published numerous journal articles and conference such as Journal of Electrochemical Energy Reviews, Journal of Energy Storage, Journal of Water Process Engineering, International Journal of Heat and Mass Transfer, Journal of Molecular Liquids, ASME International Mechanical Engineering Congress etc. He has serves as reviewer for journals such as Elsevier, Springer, etc. He is currently the Head of the ALD and innovation sub-research group and the Lead experimentalist at the ALD facility.

Tien-Chien Jen is a full professor and the Head of Department, Mechanical Engineering, University of Johannesburg. Before then, Prof Jen was a faculty member at University of Wisconsin, Milwaukee. Prof Jen received his Ph.D. in Mechanical and Aerospace Engineering from UCLA, specializing in thermal aspects of grinding. He has received several competitive grants for his research, including those from the US National Science Foundation, the US Department of Energy and the EPA. He is also the Director of Manufacturing Research Centre of the University of Johannesburg. Meanwhile, SA National Research Foundation has awarded Prof Jen a NNEP grant (National Nano Equipment Program) worth of USD 1.5 million to acquire two state-of-the-art Atomic Layer Deposition (ALD) tools to be housed in a 220m2 10000 level (ISO 7) clean room facility for ultra-thin film coating. These two ALD Research facility will be the first in South Africa and possibly the first in Africa continent. He has made extensive contributions to the field of mechanical engineering, specifically in the area of machining processes, atomic layer deposition, cold gas dynamics spraying, fuel cells and hydrogen technology, batteries, and material processing. He has published several journals articles, books and book chapters in these spaces in reputable journals, and presented in several conferences.

**Oluwatobi Adeleke** 是約翰尼斯堡大學機械工程科學系的研究員。他於2019年加入約翰尼斯堡大學，作為博士研究生，並於2022年完成博士研究。他還擁有伊巴丹大學和拉多克·阿金托拉科技大學的機械工程碩士和學士學位。他的研究興趣包括人工智慧、軟計算技術和機器學習、可再生能源、生物能源、太陽能電池、廢物轉能源及系統建模。他在原子層沉積、材料科學、腐蝕抑制、廢物管理建模與優化以及生命週期評估等研究領域也做出了廣泛的貢獻。他在《神經計算與應用》、《能源報告》、《燃料》、《可再生能源》、《生物技術報告》、《材料研究與技術期刊》、《工程科學》等多個知名期刊上發表了文章。他在這些領域還發表了多篇書章和會議論文。他是多個知名期刊的審稿人，專注於廢物管理、軟計算和可再生能源。他於2021年獲得機械科學系最佳博士研究生獎，該獎項屬於工程與建築環境學院（FEBE）的學術卓越獎。他是尼日利亞工程監管委員會（COREN）、尼日利亞工程師協會（NSE）和美國機械工程師學會（ASME）的成員。

**Sina Karimzadeh** 是約翰尼斯堡大學的博士研究候選人。他於2020年獲得約翰尼斯堡大學的機械工程碩士學位。他被選為2020年最優秀碩士研究的校長獎的候選人之一。他目前的研究興趣集中在利用原子層沉積（ALD）技術開發鋰離子電池的活性組件和界面工程。他還參與了多個項目，包括氫儲存、氫生成、薄膜和納米技術、藥物傳遞、熱傳遞、水處理膜以及計算建模和模擬。他在《電化學能源評論》、《能源儲存期刊》、《水處理工程期刊》、《國際熱質傳遞期刊》、《分子液體期刊》、《ASME國際機械工程大會》等期刊上發表了多篇文章和會議論文。他曾擔任《Elsevier》、《Springer》等期刊的審稿人。他目前是ALD和創新子研究小組的負責人，以及ALD設施的首席實驗員。

**Tien-Chien Jen** 是約翰尼斯堡大學機械工程系的全職教授及系主任。在此之前，Jen教授曾是威斯康辛大學密爾瓦基分校的教職員。Jen教授在加州大學洛杉磯分校獲得機械與航空工程博士學位，專攻磨削的熱力學方面。他的研究獲得了多項競爭性資助，包括來自美國國家科學基金會、美國能源部和環保署的資助。他還是約翰尼斯堡大學製造研究中心的主任。同時，南非國家研究基金會已向Jen教授頒發了價值150萬美元的NNEP（國家納米設備計劃）資助，用於購置兩台最先進的原子層沉積（ALD）設備，這些設備將安置在一個220平方米、10,000級（ISO 7）潔淨室內，用於超薄膜塗層。這兩個ALD研究設施將是南非首個，並可能是非洲大陸的首個。他在機械工程領域做出了廣泛的貢獻，特別是在加工過程、原子層沉積、冷氣體動力噴塗、燃料電池和氫技術、電池及材料加工等方面。他在這些領域的知名期刊上發表了多篇期刊文章、書籍和書章，並在多個會議上進行了報告。