Micromachining: Scanning Probe Lithography
Anggraini, Lydia
- 出版商: Independently Published
- 出版日期: 2019-03-13
- 售價: $2,520
- 貴賓價: 9.5 折 $2,394
- 語言: 英文
- 頁數: 82
- 裝訂: Quality Paper - also called trade paper
- ISBN: 1090363265
- ISBN-13: 9781090363268
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相關分類:
微電子學 Microelectronics
海外代購書籍(需單獨結帳)
相關主題
商品描述
This book describe how nanoscale resist patterns technology were machined or fabricated on a silicon substrate using a scanning probe microscope (SPM) based on nanolithography (SPNL). The advantage by using this technology is the low cost of nanopatterning device technology can be created, where an atomic force microscope (AFM) is used. Conventional SPNL directly writes nanopatterns using a single probe cantilever.
