Fundamentals of Microfabrication and Nanotechnology, Volume I, 3/e (Hardcover)

Marc J. Madou

  • 出版商: CRC
  • 出版日期: 2011-07-13
  • 售價: $1,520
  • 語言: 英文
  • 頁數: 656
  • 裝訂: Hardcover
  • ISBN: 1420055119
  • ISBN-13: 9781420055115
  • 相關分類: 奈米科技 Nano
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商品描述

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms.

Topics include:

     

  • Crystallography and the crystalline materials used in many semiconductor devices
  • Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS
  • Single crystal Si properties that conspire to make Si so important
  • Optical properties of bulk 3D metals, insulators, and semiconductors
  • Effects of electron and photon confinement in lower dimensional structures
  • How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics
  • Metamaterials and how they could make for perfect lenses, changing the photonic field forever
  • Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior
  • Electromechanical and optical analytical processes in miniaturized components and systems

The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.

商品描述(中文翻譯)

《固態物理學、流體力學和微納技術中的分析技術》提供了對微機電系統(MEMS)和納米機電系統(NEMS)的清晰理論理解,並聚焦於納米技術及其背後的科學,包括固態物理學。該書清晰解釋了集成電路(ICs)、MEMS和NEMS所依賴的固體的電子、機械和光學特性。在探討矽、MEMS和NEMS的歷史背景後,本書討論了晶體學、量子力學、固體能帶理論和矽單晶。最後,本書涵蓋了光子學、量子霍爾效應和超導性。全書以彩色插圖呈現,並提供章末問題、實例、廣泛的參考文獻和詞彙全解。

主題包括:
- 晶體學和許多半導體器件中使用的晶體材料
- 量子力學、固體能帶理論以及在ICs和NEMS背景下量子力學的相關性
- 單晶矽的特性,使其如此重要
- 3D金屬、絕緣體和半導體的光學特性
- 低維結構中電子和光子束縛效應
- 金屬表面上的蒸發場如何在等離子體學中實現超過繞射極限的光導引
- 變形材料及其如何成為完美透鏡,徹底改變光子領域
- 流體推進機制以及微小化對流體行為的影響
- 微小化元件和系統中的電機機械和光學分析過程

本書是《微製造和納米技術基礎,第三版,三卷套裝》中的第一卷,介紹了用於集成電路、MEMS和NEMS的固體的電子、機械和光學特性,並涵蓋了量子力學、電化學、流體力學和光子學。它為對MEMS和NEMS的定性和定量理論理解奠定了基礎。