Ion Sources
Zhang, Jianrong, Zhang, Huashun
- 出版商: Springer
- 出版日期: 2010-12-03
- 售價: $9,750
- 貴賓價: 9.5 折 $9,263
- 語言: 英文
- 頁數: 476
- 裝訂: Quality Paper - also called trade paper
- ISBN: 3642085024
- ISBN-13: 9783642085024
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相關分類:
Engineer self-growth、微電子學 Microelectronics、物理學 Physics
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相關主題
商品描述
This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.
