Advanced Measurement, Imaging, and Instruments: Selected Papers from Ismtii / Icoim 2025
暫譯: 高級測量、成像與儀器：來自 Ismtii / Icoim 2025 的選定論文
Liu, Shiyuan, Zhu, Jinlong, Yang, Shuming
相關主題
商品描述
This book includes original, peer-reviewed research papers from the 16th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2025) and the 3rd International Conference of Optical Imaging and Measurement (ICOIM 2025), held in Wuhan, China on May 25-28, 2025. The topics covered include but are not limited to: Measurement and characterization for atomic-level manufacturing, micro and nanometrology, quantum sensing and instruments, metrology and instruments for integrated circuits, in-process and inline metrology, optical metrology and inspection, surface metrology, material characterization, machine learning and signal processing, intelligent instrument for automation, sensors and actuators, uncertainty, traceability and calibration, optical imaging, optical technology, application and precision measurement, optical measurement, photoelectric device, optoelectronics and communication, biomedical optics, and optical material.
The papers showcased here share the latest findings on optical metrology, optical imaging, nanometrology, intelligent systems, and process control, making the book a valuable asset for researchers, engineers, and university students alike.
商品描述(中文翻譯)
本書包含來自第十六屆國際測量技術與智能儀器研討會（ISMTII 2025）及第三屆國際光學成像與測量會議（ICOIM 2025）的原創、經過同行評審的研究論文，會議於2025年5月25日至28日在中國武漢舉行。涵蓋的主題包括但不限於：原子級製造的測量與特徵化、微米和納米計量、量子感測與儀器、集成電路的計量與儀器、過程中及在線計量、光學計量與檢測、表面計量、材料特徵化、機器學習與信號處理、自動化智能儀器、感測器與執行器、不確定性、可追溯性與校準、光學成像、光學技術、應用與精密測量、光學測量、光電裝置、光電與通信、生物醫學光學及光學材料。
這裡展示的論文分享了光學計量、光學成像、納米計量、智能系統及過程控制的最新研究成果，使本書成為研究人員、工程師及大學生的寶貴資源。
作者簡介
Jinlong Zhu received the Ph.D. degree in mechanical engineering from Huazhong University of Science and Technology (HUST), Wuhan, China, in 2015. From 2015 to 2020, he worked as a post-doctoral researcher at the University of Illinois Urbana-Champaign, Champaign, IL, USA. He became a professor with Huazhong University of Science and Technology in 2020. He conducts research on basic science and engineering at the intersection of optical physics, nanodevices, semiconductor integrated circuit (IC) chips in industrial robots, and machine learning.
Shiyuan Liu received his Ph.D. in mechanical engineering from Huazhong University of Science and Technology (HUST), Wuhan, China in 1998, and worked as a visiting scholar at University of Manchester, UK, from 2000 to 2001. He has become a full professor with HUST since 2005 and is currently the director of the Precision Instrument Research Center (PIRC) at HUST. He was elected as a fellow of the Institute of Physics (IOP) and a board member of the International Committee of Measurement and Instrumentation (ICMI). His main research interests are computational imaging and computational lithography, nanometrology and instrumentation, and inline measurement and inspection for semiconductor manufacturing.
Shuming Yang is a full professor of Xi'an Jiaotong University (XJTU), China. He achieved bachelor degree and master degree from Xi'an Jiaotong University and Ph.D. from the University of Huddersfield. His main research interests include nanofabrication and measurement, optical measurement and instrumentation, intelligent manufacturing etc. He was elected as a fellow of the International Society for Nanomanufacturing (ISNM), and is the current president of Asian Society for Precision Engineering and Nanotechnology (ASPEN) etc. He is also an editor or a guest editor of JMS, IJPEM-GT, NMME, PE, IJRAT, FME, IJEM, MST, IJAMT, Photonics etc. He delivered plenary/keynote/invited talks in academic conferences over 100 times.
作者簡介(中文翻譯)
金龍朱於2015年在中國武漢華中科技大學（HUST）獲得機械工程博士學位。從2015年到2020年，他在美國伊利諾伊大學香檳分校擔任博士後研究員。2020年，他成為華中科技大學的教授。他的研究領域包括光學物理、納米裝置、工業機器人中的半導體集成電路（IC）晶片以及機器學習等基礎科學與工程的交叉領域。
劉世源於1998年在中國武漢華中科技大學（HUST）獲得機械工程博士學位，並於2000年至2001年期間在英國曼徹斯特大學擔任訪問學者。自2005年以來，他成為華中科技大學的正教授，並目前擔任華中科技大學精密儀器研究中心（PIRC）主任。他被選為物理學會（IOP）會士及國際計量與儀器委員會（ICMI）董事會成員。他的主要研究興趣包括計算成像與計算光刻、納米計量與儀器，以及半導體製造的在線測量與檢查。
楊樹明是中國西安交通大學（XJTU）的正教授。他在西安交通大學獲得學士和碩士學位，並在哈德斯菲爾德大學獲得博士學位。他的主要研究興趣包括納米製造與測量、光學測量與儀器、智能製造等。他被選為國際納米製造學會（ISNM）會士，並目前擔任亞洲精密工程與納米技術學會（ASPEN）會長等職位。他也是《JMS》、《IJPEM-GT》、《NMME》、《PE》、《IJRAT》、《FME》、《IJEM》、《MST》、《IJAMT》、《Photonics》等期刊的編輯或客座編輯。他在學術會議上發表了超過100次的全體/主題/邀請演講。
