Introduction to Microsystem Technology: A Guide for Students (Wiley Microsystem and Nanotechnology) (Hardcover)

Gerald Gerlach, Wolfram Dotzel

  • 出版商: Wiley
  • 出版日期: 2008-05-01
  • 售價: $1,600
  • 貴賓價: 9.8$1,568
  • 語言: 英文
  • 頁數: 376
  • 裝訂: Hardcover
  • ISBN: 0470058617
  • ISBN-13: 9780470058619
  • 相關分類: 奈米科技 Nano
  • 立即出貨 (庫存=1)

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Description

Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads.

This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following:

  • microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro;
  • fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques;
  • sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described);
  • the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe?

The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.

商品描述(中文翻譯)

半個世紀以來,壓阻效應的發現使得微系統技術得到了顯著的發展。將微電子學的應用擴展到非電子系統,其應用領域不斷擴大。微感測器是其中最重要的領域之一,被應用於醫療和微機械領域。微流體系統也是一個重要的領域,最常用於噴墨打印頭。

本教科書專注於微系統技術的基礎知識,提供了一個清晰的學習路徑。以學生為導向的方法,介紹了以下內容:
- 微系統材料(包括矽、聚合物和薄膜),以及微小尺度效應;
- 基於不同材料特性的製造技術,描述了它們的限制以及這些技術所產生的功能和形狀元素;
- 基於機械、流體和熱等元素的感測器和致動器(包括偏航速率感測器組件);
- 技術參數對微系統性能的影響,例如,何時微系統設備的功能是穩健和安全的。

每章末尾都提供了問題,以便您測試對關鍵概念的理解(這些問題的完整解答可在附帶的網站上找到)。還包括實際例子和案例研究,以更好地理解整個技術。由於該書廣泛涵蓋了微系統技術的基礎知識,也可作為從事微系統技術工作的工程師和技術人員的手冊。