Microsensors, MEMS and Smart Devices (Hardocver)

Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim

  • 出版商: Wiley
  • 出版日期: 2001-12-27
  • 售價: $1,216
  • 語言: 英文
  • 頁數: 528
  • 裝訂: Hardcover
  • ISBN: 047186109X
  • ISBN-13: 9780471861096
  • 相關分類: 感測器 Sensor
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商品描述

Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.
Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices.
Features include:
* Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods.
* Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines.
* Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin.
* An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology.
* Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field.
Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

Table of Contents

Preface.

About the Authors.

Acknowledgments.

Introduction.

Electronic Materials and Processing.

MEMS Materials and their Preparation.

Standard Microelectronic Technologies.

Silicon Micromachining: Bulk.

Silicon Micromachining: Surface.

Microstereolithography for MEMS.

Microsensors.

Introduction to SAW Devices.

Surface Acoustic Waves in Solids.

IDT Microsensor Parameter Measurement.

IDT Microsensor Fabrication.

IDT Microsensors.

MEMS-IDT Microsensors.

Smart Sensors and MEMS.

Appendix A: List of Abbreviations.

Appendix B: List of Symbols and Prefixes.

Appendix C: List of Some Important Terms.

Appendix D: Fundamental Constants.

Appendix E: Unit Conversion Factors.

Appendix F: Properties of Electronic & MEMS Metallic Materials.

Appendix G: Properties of Electronic & MEMS Semiconducting Materials.

Appendix H: Properties of Electronic & MEMS Ceramic and Polymer Materials.

Appendix I: Complex Reciprocity Relation and Perturbation Analysis.

Appendix J: Coupled-mode Modeling of a SAW Device.

Appendix K: Suggested Further Reading.

Appendix L: Webography.

Appendix M: List of Worked Examples.

Index.

商品描述(中文翻譯)

微感測器和微機電系統(MEMS)正在改變半導體行業。微系統或所謂的“片上系統”將微電子電路與微感測器和微致動器結合在一起。這個新興領域已經見證了從電子鼻和智能耳到微鉗子和現代噴墨噴嘴等應用的發展。

這本獨特的參考書提供了對微感測器技術的全面概述,並解決了成功應用微感測器、MEMS和智能設備所需的重要整合問題。

特點包括:
- 回顧傳統和新興的製造工藝,包括體積和矽微加工、微立體光刻和聚合物加工方法。
- 重點介紹IDT(互數式變換器)微感測器在開發低能耗、無線MEMS或微機器方面的應用。
- 涵蓋智能設備中最新的應用,包括電子鼻、舌頭和手指,以及智能感測器和結構,如智能皮膚。
- 通過使用感測器陣列、參數補償和ASIC技術,概述了智能感測設備的發展。
- 全面的附錄,概述了重要的MEMS材料特性、相關網站和該領域的重要機構指南。

《微感測器、MEMS和智能設備》為讀者提供了理解和評估微系統的手段。高級學生和微電子研究人員、微感測器系統的工程師和開發人員將發現這本全面的參考書是必讀之選。材料特性的詳細介紹使其成為機械工程師、物理學家和材料科學家在該領域工作的重要參考工具。

《目錄》
- 前言
- 作者簡介
- 致謝
- 引言
- 電子材料和加工
- MEMS材料及其製備
- 標準微電子技術
- 矽微加工:體積
- 矽微加工:表面
- 用於MEMS的微立體光刻
- 微感測器
- 表面聲波設備簡介
- 固體中的表面聲波
- IDT微感測器參數測量
- IDT微感測器製造
- IDT微感測器
- MEMS-IDT微感測器
- 智能感測器和MEMS
- 附錄A:縮寫列表
- 附錄B:符號和前綴列表
- 附錄C:一些重要術語列表
- 附錄D:基本常數
- 附錄E:單位換算因子
- 附錄F:電子和MEMS金屬材料特性
- 附錄G:電子和MEMS半導體材料特性
- 附錄H:電子和MEMS陶瓷和聚合物材料特性
- 附錄I:復雜互易關係和微擾分析
- 附錄J:表面聲波設備的耦合模態建模
- 附錄K:建議進一步閱讀
- 附錄L:網站目錄
- 附錄M:實例列表
- 索引