Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
Kao, Imin, Chung, Chunhui
- 出版商: Wiley
- 出版日期: 2021-03-29
- 售價: $4,540
- 貴賓價: 9.5 折 $4,313
- 語言: 英文
- 頁數: 304
- 裝訂: Hardcover - also called cloth, retail trade, or trade
- ISBN: 0470061219
- ISBN-13: 9780470061213
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.
This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
Imin Kao, is Professor in the Department of Mechanical Engineering at the State University of New York in Stony Brook, USA. He is Faculty Director of the Undergraduate College in Information and Technology Studies. He holds three patents, and his research foci include robotic manipulation with soft contacts and smart contact surface technology using MEMS.
Chunhui Chung, is Associate Professor in the Department of Mechanical Engineering at the National Cheng Kung University in Taiwan.