Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.

This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.

呈現晶片製造的所有主要階段，從晶體到優質晶片。

本書首先概述物理學、相關計量學、過程模擬和品質要求，然後討論晶片成型和晶片表面處理技術。最後一章則探討晶片製造的研究和未來挑戰。

Imin Kao, is Professor in the Department of Mechanical Engineering at the State University of New York in Stony Brook, USA. He is Faculty Director of the Undergraduate College in Information and Technology Studies. He holds three patents, and his research foci include robotic manipulation with soft contacts and smart contact surface technology using MEMS.

Chunhui Chung, is Associate Professor in the Department of Mechanical Engineering at the National Cheng Kung University in Taiwan.

Imin Kao（高一民）是美國紐約州立大學石溪分校（State University of New York in Stony Brook）機械工程系的教授。他同時擔任資訊與科技研究學士學院的教務主任。他擁有三項專利，他的研究重點包括軟接觸機器人操作和利用微機電系統的智能接觸表面技術。

Chunhui Chung（鍾俊輝）是台灣國立成功大學機械工程系的副教授。