Surfaces, Interfaces, and Films for Microelectronics

Eugene A. Irene

  • 出版商: Wiley
  • 出版日期: 2008-01-01
  • 售價: $6,800
  • 貴賓價: 9.5$6,460
  • 語言: 英文
  • 頁數: 536
  • 裝訂: Hardcover
  • ISBN: 0470174471
  • ISBN-13: 9780470174470
  • 相關分類: 微電子學 Microelectronics
  • 海外代購書籍(需單獨結帳)

商品描述

The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.