Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems
暫譯: 微納製造與微電機系統

Li, Jingmin, Liu, Chong, Wang, Liding

Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems
  • 出版商: Springer
  • 出版日期: 2026-04-24
  • 售價: $4,450
  • 貴賓價: 9.5 折 $4,227
  • 語言: 英文
  • 頁數: 349
  • 裝訂: Hardcover - also called cloth, retail trade, or trade
  • ISBN: 9819547571
  • ISBN-13: 9789819547579
  • 相關分類: 微電子學 Microelectronics

    • 海外代購書籍(需單獨結帳)

相關主題

商品描述

This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS). The book is divided into eight chapters, including the concept and development of MEMS, principles and application examples of bulk and surface silicon process, microfabrication technology of non-silicon materials, MEMS microsensors, MEMS microactuators, recent developments in biomedical, telecommunication, and aerospace fields. This book combines process principles and application examples with rigorous logic. It is suitable for basic learning and knowledge expansion for readers majoring in mechanical engineering, instrument science and technology, electronic science and technology, and physics.

商品描述(中文翻譯)

本書是一部結構良好的教科書，系統性地介紹與微納製造及微電機械系統（MEMS）相關的基本概念、製程技術、典型設備和系統應用。全書分為八個章節，包括MEMS的概念與發展、大宗矽製程和表面矽製程的原理與應用範例、非矽材料的微製造技術、MEMS微傳感器、MEMS微致動器，以及生物醫學、電信和航空航天領域的最新發展。本書將製程原理與應用範例結合，邏輯嚴謹，適合機械工程、儀器科學與技術、電子科學與技術及物理學等相關領域的讀者進行基礎學習和知識擴展。

作者簡介

Prof. Jingmin Li is currently a professor at Dalian University of Technology. His research interest covers MEMS/NEMS, high power microbatteries, and multiscale numerical simulation. He has published 120+ journal papers, 1 book, 2 book chapters and been granted 45 China patents. He is currently the PI of the National Key Research and Development Program Project and other 4 projects. He wins the Second Class Prize of the 2022 National Teaching Achievement Award (Higher Education) and the Top Class Prize of the 2022 Liaoning Teaching Achievement Award (Higher Education). He is also the recipient of numerous scientific and technological awards, including 2019 Machinery Industry Science and Technology Award, 2018 Liaoning Medical Science Award, and 2016 Chinese Medical Science Award. He currently teaches Introduction to Mechanical Engineering for undergraduate students and microfabrication and MEMS for graduate students.

Prof. Chong Liu is currently a professor at Dalian University of Technology. His main research fields include MEMS, biochemical sensors, the Internet of Things (IoT), and precision instrument and measurement. As a principle investigator, he has conducted 3 projects supported by National High Technology Research and Development Program of China, 2 projects supported by National Key Technology R&D Program, one project supported by National Basic Research Program of China, 1 major project supported by National Natural Science Foundation of China, and 3 general projects supported by National Science Foundation of China. He has obtained 2 achievements appraisement of science and technology and 62 patents. He has published 2 monographs and more than 90 journal papers. Seventy-six students have graduated from his group.

Prof. Liding Wang is an academician of the Chinese Academy of Sciences (CAS). He is an expert in precision machinery and micro/nano fabrication fields. He has published 200+ peer-reviewed journal papers and 2 books. He is the vice chairman of Chinese Society of Micro-Nano Technology (CSMNT), executive director of the China Instrument and Control Society (CIS), executive director of the Chinese Society for Measurement (CSM), and special invited director of the Chinese Mechanical Engineering Society (CMES). He has won numerous awards, including 2 Second Class Prizes and one Third Class Prize of the National Science and Technology Progress Award, 1 National Science Conference Award, and 1 Outstanding Scientist in Contemporary Instrumentation and Measurement Control Award of CIS.

作者簡介(中文翻譯)

李景敏教授目前是大連理工大學的教授。他的研究興趣涵蓋MEMS/NEMS、高功率微電池以及多尺度數值模擬。他已發表超過120篇期刊論文、1本書、2章書籍，並獲得45項中國專利。他目前是國家重點研究與發展計畫的首席研究員，並參與其他4個項目。他獲得2022年全國教學成果獎（高等教育）二等獎及2022年遼寧省教學成果獎（高等教育）特等獎。他還獲得多項科學和技術獎項，包括2019年機械工業科學技術獎、2018年遼寧省醫學科學獎和2016年中國醫學科學獎。他目前教授本科生的機械工程導論以及研究生的微製造和MEMS課程。

劉沖教授目前是大連理工大學的教授。他的主要研究領域包括MEMS、生化傳感器、物聯網（IoT）以及精密儀器與測量。作為首席研究員，他主持了3個由中國國家高技術研究與發展計畫支持的項目、2個由國家重點技術研發計畫支持的項目、1個由中國國家基礎研究計畫支持的項目、1個由中國國家自然科學基金支持的重大項目，以及3個由中國國家科學基金支持的一般項目。他已獲得2項科技成果評價和62項專利。他已發表2部專著和90多篇期刊論文。共有76名學生從他的研究小組畢業。

王立丁教授是中國科學院（CAS）的院士。他是精密機械和微/納米製造領域的專家。他已發表超過200篇同行評審的期刊論文和2本書。他是中國微納技術學會（CSMNT）的副會長、中國儀器與控制學會（CIS）的執行理事、中國測量學會（CSM）的執行理事，以及中國機械工程學會（CMES）的特邀理事。他獲得多項獎項，包括2項國家科技進步獎的二等獎和1項三等獎、1項全國科學大會獎，以及1項CIS當代儀器與測量控制傑出科學家獎。

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