Microsystem Design (Hardcover)
Stephen D. Senturia
- 出版商: Springer
- 出版日期: 2004-12-08
- 售價: $1,200
- 貴賓價: 9.5 折 $1,140
- 語言: 英文
- 頁數: 689
- 裝訂: Hardcover
- ISBN: 0792372468
- ISBN-13: 9780792372462
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商品描述
The goal of this book is to bring together into one
accessible text the fundamentals of the many disciplines needed by today's
engineer working in the field of microelectromechanical systems (MEMS).
The subject matter is wide-ranging: microfabrication, mechanics, heat
flow, electronics, noise, and dynamics of systems, with and without feedback.
Because it is very difficult to enunciate principles of `good design' in the
abstract, the book is organized around a set of Case Studies that are based on
real products, or, where appropriately well-documented products could not be
found, on thoroughly published prototype work.
The Case Studies were
selected to sample a multidimensional space: different manufacturing and
fabrication methods, different device applications, and different physical
effects used for transduction. The Case Study subjects are: the design and
packaging of a piezoresistive pressure sensor, a capacitively-sensed
accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two
electrostatically-actuated optical projection displays, two microsystems for the
amplification of DNA, and a catalytic sensor for combustible gases.
This
book is used for a graduate course in `Design and Fabrication of
Microelectromechanical Devices (MEMS)' at the Massachusetts Institute of
Technology. It is appropriate for textbook use by senior/graduate courses in
MEMS, and will be a useful reference for the active MEMS professional.
Each chapter is supplemented with homework problems and suggested
related reading. In addition, the book is supported by a web site that will
include additional homework exercises, suggested design problems and related
teaching materials, and software used in the textbook examples and homework
problems.
Contents
Foreword. Preface. Acknowledgments. Part I: Getting Started. 1. Introduction. 2. An Approach to MEMS Design. 3. Microfabrication. 4. Process Integration. Part II: Modeling Strategies. 5. Lumped Modeling. 6. Energy-Conserving Transducers. 7. Dynamics. Part III: Domain-Specific Details. 8. Elasticity. 9. Structures. 10. Energy Methods. 11. Dissipation and the Thermal Energy Domain. 12. Lumped Modeling of Dissipative Processes. 13. Fluids. Part IV: Circuit and System Issues. 14. Electronics. 15. Feedback Systems. 16. Noise. Part V: Case Studies. 17. Packaging. 18. A Piezoresistive Pressure Sensor. 19. A Capacitive Accelerometer. 20. Electrostatic Projection Displays. 21. A Piezoelectric Rate Gyroscope. 22. DNA Amplification. 23. A Microbridge Gas Sensor. Appendices: A. Glossary of Notation. B. Electromagnetic Fields. C. Elastic Constants in Cubic Material. References. Ind