Microsystem Design (Hardcover)

Stephen D. Senturia

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商品描述

The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS).

The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of `good design' in the abstract, the book is organized around a set of Case Studies that are based on real products, or, where appropriately well-documented products could not be found, on thoroughly published prototype work.

The Case Studies were selected to sample a multidimensional space: different manufacturing and fabrication methods, different device applications, and different physical effects used for transduction. The Case Study subjects are: the design and packaging of a piezoresistive pressure sensor, a capacitively-sensed accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two electrostatically-actuated optical projection displays, two microsystems for the amplification of DNA, and a catalytic sensor for combustible gases.

This book is used for a graduate course in `Design and Fabrication of Microelectromechanical Devices (MEMS)' at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and will be a useful reference for the active MEMS professional.

Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.

Contents

Foreword. Preface. Acknowledgments. Part I: Getting Started. 1. Introduction. 2. An Approach to MEMS Design. 3. Microfabrication. 4. Process Integration. Part II: Modeling Strategies. 5. Lumped Modeling. 6. Energy-Conserving Transducers. 7. Dynamics. Part III: Domain-Specific Details. 8. Elasticity. 9. Structures. 10. Energy Methods. 11. Dissipation and the Thermal Energy Domain. 12. Lumped Modeling of Dissipative Processes. 13. Fluids. Part IV: Circuit and System Issues. 14. Electronics. 15. Feedback Systems. 16. Noise. Part V: Case Studies. 17. Packaging. 18. A Piezoresistive Pressure Sensor. 19. A Capacitive Accelerometer. 20. Electrostatic Projection Displays. 21. A Piezoelectric Rate Gyroscope. 22. DNA Amplification. 23. A Microbridge Gas Sensor. Appendices: A. Glossary of Notation. B. Electromagnetic Fields. C. Elastic Constants in Cubic Material. References. Ind

商品描述(中文翻譯)

本書的目標是將微機電系統(MEMS)領域中現代工程師所需的多個學科基礎整合到一本易於理解的教材中。

主題涵蓋範圍廣泛,包括微製造、力學、熱流、電子學、噪音以及有反饋和無反饋系統的動力學。由於很難在抽象的情況下闡述“良好設計”的原則,本書以一系列案例研究為組織架構,這些案例研究基於真實產品,或者在找不到適當有文獻記載的產品的情況下,基於充分發表的原型工作。

案例研究的選擇是為了樣本多維空間:不同的製造和加工方法、不同的器件應用以及用於轉換的不同物理效應。案例研究的主題包括:壓阻式壓力傳感器的設計和封裝、電容式加速度計、石英壓電驅動和感測的角速度陀螺儀、兩個靜電驅動的光學投影顯示器、兩個用於DNA放大的微系統以及用於可燃氣體的催化傳感器。

本書用於麻省理工學院的“微機電設備(MEMS)的設計和製造”研究生課程。適用於高年級/研究生MEMS課程的教科書,並且對於從事MEMS專業工作的人士也是一個有用的參考資料。

每章附有作業問題和建議的相關閱讀。此外,本書還有一個網站,包括額外的作業練習、建議的設計問題和相關教學資料,以及教科書示例和作業問題中使用的軟件。

目錄:
前言。前言。致謝。第一部分:入門。1. 簡介。2. MEMS設計方法。3. 微製造。4. 過程整合。第二部分:建模策略。5. 集中建模。6. 節能傳感器。7. 動力學。第三部分:領域特定細節。8. 彈性。9. 結構。10. 能量方法。11. 耗散和熱能領域。12. 耗散過程的集中建模。13. 流體。第四部分:電路和系統問題。14. 電子學。15. 反饋系統。16. 噪音。第五部分:案例研究。17. 封裝。18. 壓阻式壓力傳感器。19. 電容式加速度計。20. 靜電投影顯示器。21. 壓電角速度陀螺儀。22. DNA放大。23. 微橋氣體傳感器。附錄:A. 符號說明。B. 電磁場。C. 立方材料的彈性常數。參考文獻。