Description 

Establishes the theoretical foundation needed for the synthesis, modeling, simulation, analysis, and design of nano- and microsystems

Covers the concepts, techniques, and technologies needed to solve problems related to NEMS and MEMS, devices, and their structures

Provides a multidisciplinary approach that encompasses a range of science and engineering disciplines

Includes new revisions of every chapter

Provides homework problems, case studies, and a solutions manual with qualifying course adoptions

Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science.

Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.

Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.

Table of Contents

NANOTECHNOLOGY AND MICROTECHNOLOGY (NANO- AND MICRO- SCIENCE, ENGINEERING AND TECHNOLOGY), AND BEYOND
Introduction and Overview: From Micro- to Nano- and Beyond to Stringo-Scale
Introductory Definitions to the Subjects
Current Developments and Needs for Coherent Revolutionary Developments
Societal Challenges and Implications
NANO- AND MICROSCALE SYSTEMS, DEVICES, AND STRUCTURES
Sizing Features: From Micro- to Nano-, and from Nano- to Stringo-Scale MEMS and NEMS Definitions
Introduction to Taxonomy of Nano- and Microsystem Synthesis and Design
Introduction to Design and Optimization of Nano- and Microsystems in the Behavioral Domain
NANO- AND MICROSYSTEMS: CLASSIFICATION AND CONSIDERATION
Biomimetics, Biological Analogies,and Design of NEMS and MEMS
Micro- and Nanoelectromechanical Systems: Scaling Laws and Mathematical Modeling
MEMS Examples and MEMS Architectures
Introduction to Microfabrication and Micromachining
FUNDAMENTALS OF MICROFABRICATION AND MEMS FABRICATION TECHNOLOGIES
Introduction and Description of Basic Processes in Microfabrication
Microfabrication and Micromachining of ICs, Microstructures, and Microdevices
MEMS Fabrication Technologies
DEVISING AND SYNTHESIS OF NEMS AND MEMS
Motion Nano- and Microdevices: Synthesis and Classification
Microaccelerometers as Microelectromechanical Microdevices
Optimization with Application to Synthesis and Classification Solver
Nanoengineering Bioinformatics and Its Application
MODELING OF MICRO- AND NANOSCALE ELECTROMECHANICAL SYSTEMS AND DEVICES
Introduction to Modeling, Analysis, and Simulation
Basic Electromagnetics with Applications to MEMS and NEMS
Model Developments of Micro- and Nanoactuators Using Electromagnetics
Classical Mechanics and Its Application to MEMS
Equations of Motions
Direct-Current Micromachines
Simulation of MEMS in the MATLAB Environment with Examples
Induction Micromachines
Synchronous Micromachines
Permanent-Magnet Stepper Micromotors
Piezotransducers
Modeling of Electromagnetic Radiating Energy Microdevices
Thermodynamics, Thermoanalysis, and Heat Equation
QUANTUM MECHANICS AND ITS APPLICATIONS
Atomic Structures and Quantum Mechanics
Molecular and Nanostructure Dynamics
Quantum Mechanics and Energy Bands
MOLECULAR AND CARBON NANOELECTRONICS
Past, Current, and Future of Electronics with Prospects for 2020 and Beyond
Fundamentals
Carbon Nanotubes
Carbon-Based Nanoelectronics and Three-Dimensional Nano-ICs
CONTROL OF MEMS AND NEMS
Continuous-Time and Discrete-Time MEMS
Analog Control of MEMS Using Transfer Functions
The Hamilton-Jacobi Theory and Optimal Control of MEMS and NEMS
Sliding Mode Control of MEMS and NEMS
Constrained Control of Nonlinear MEMS and NEMS
Optimization of Microsystems Using Nonquadratic Performance Functionals
Hamilton-Jacobi Theory and Quantum Mechanics
Lyapunov Stability Theory in Analysis and Control of MEMS and NEMS
Digital Control of MEMS and NEMS
EXAMPLES IN SYNTHESIS, ANALYSIS, DESIGN AND FABRICATION OF MEMS
Introduction
Analysis of Energy Conversion and MEMS Performance from Materials and Fabrication Viewpoints
Analysis of Translational Microtransducers
Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control
Microfabrication Topics
Magnetization Dynamics of Thin Films
Microstructures and Microtransducers with Permanent-Magnet: Micromirror Actuators
Reluctance Electromagnetic Micromotors
Micromachined Polycrystalline Silicon Carbide Micromotors
Axial Electromagnetic Micromotors
Cognitive Computer-Aided Design of MEMS

描述

建立了合成、建模、模擬、分析和設計納米和微系統所需的理論基礎
涵蓋了解決與NEMS和MEMS、設備及其結構相關問題所需的概念、技術和技術
提供了一種跨學科的方法，涵蓋了一系列科學和工程學科
包括每章的新修訂
提供了作業問題、案例研究和有資格課程採用的解答手冊

社會從科學和工程的各個角度接近和推進納米和微技術。對進一步的基礎、應用和實驗研究的需求與對捕捉科學的多學科和多面向性質的高品質參考資料的需求相匹配。

《納米和微電機械系統：納米和微工程基礎》第二版提供了適用於許多領域的尖端信息，建立了理解、建模、控制、模擬和設計納米和微系統的理論基礎。本書專注於納米和微工程的基礎和納米和微技術。它強調了NEMS和MEMS的多學科原則以及基本理論在工程實踐和技術發展中的實際應用。

本書在第二版中進行了重大修訂，以反映基礎和技術方面，引入了解決各種與高性能納米和微系統相關的問題所需的概念、方法、技術和技術。本書以教科書風格撰寫，現在每章都包含作業問題、示例和參考文獻列表，以及單獨的解答手冊。它旨在滿足本科和研究生學生、研究人員和納米和微工程領域專業人士的不斷增長的需求，並使他們能夠為納米技術革命做出貢獻。

目錄

納米技術和微技術（納米和微科學、工程和技術）以及超越
介紹和概述：從微觀到納米，再到超級尺度
對主題的介紹定義
目前的發展和對一致性革命性發展的需求
社會挑戰和影響
納米和微尺度系統、設備和結構
尺寸特徵：從微觀到納米，從納米到超級尺度的MEMS和NEMS定義
納米和微系統合成和設計的分類和考慮
在行為領域中納米和微系統的設計和優化介紹
納米和微系統：分類和考慮
仿生學、生物類比和NEMS和MEMS的設計
微和納米電機機械系統：縮放定律和數學建模
MEMS示例和