Micro-Fluidic and Micro-Electromechanical System Applications: Subtractive Processing of Glass Substrates
暫譯: 微流體與微機電系統應用：玻璃基板的減法加工

這段文字專注於涵蓋先進的製造流程，以製造微流體和微電機系統裝置。

Nguyen Van Toan received his B.S. degree in 2006 and his M.S. degree in 2009 in physics and electronics, respectively, from University of Science, Vietnam National University, Ho Chi Minh City, Viet Nam. He received his Dr. Eng. degree from Tohoku University in 2014 for research on silicon capable of integrating LSI for application to timing devices. He currently works as an Associate Professor at Micro System Integration Center, Tohoku University. He has published 90 peer-reviewed journal papers, four patents, one book, and four book chapters. His research results have been presented in over 100 conferences. He had a class in MEMS/NEMS seminar and mechanical systems engineering, offering guidance to over 30 graduate students. He has received several awards, including Research Travel Award for IEEE-MEMS conferences (in 2017 and 2020) and for IEEE-Transducers (2017), Outstanding paper awards in IEEE-NANO and IEEE-NEMS, Best paper award in 2019 (IEEJ), Best published paper in 2022 (University of Science, VNU, Viet Nam), and Electrical Science Promotion Award in 2022 (電気学-IEE, 電気学術振興賞). He is pursuing an all-in-one micro/nano energy system, including energy harvesting, energy storage and sensing, and developing high-performance functional materials and devices. His current research interests include capacitive silicon resonators, optical modulator devices, thermal-to-electric power generators, gas sensing, micro-supercapacitor, Knudsen pump, ion transportation and metal-assisted chemical etching.

Tarlochan Singh is currently serving as an Assistant Professor in the School of Product and Industrial Design at Lovely Professional University (LPU), Jalandhar, a position he has held since March 2022. Prior to joining LPU, he was an Institutional Post-doctoral Fellow at the Indian Institute of Technology (IIT) Bombay, India. Dr. Singh earned his B.Tech. in Mechanical Engineering with a Gold Medal from Punjab Technical University in 2011, followed by an M.Tech. in Production and Industrial Systems Engineering from IIT Roorkee in 2013. He completed his Ph.D. in Advanced Machining Processes from IIT Roorkee in 2019. His current research focuses on advanced manufacturing techniques, particularly the machining of hard-to-cut materials and the development of innovative micro-machining processes. He has published 25 peer-reviewed journal articles, holds two patents, and has contributed one book and three book chapters. Dr. Singh is actively involved in the development of sequential and hybrid non-conventional machining methods for processing and finishing hard-to-machine ceramics. Additionally, he is engaged in product design and development using polymer waste materials and is exploring surface modification techniques for ceramics and metals for applications in MEMS and biomedical devices.

阮文通於2006年獲得越南胡志明市國立大學科學大學物理與電子學的學士學位，並於2009年獲得碩士學位。他於2014年在東北大學獲得工程博士學位，研究主題為能夠整合LSI的矽材料在定時裝置中的應用。他目前擔任東北大學微系統整合中心的副教授。他已發表90篇經過同行評審的期刊論文，擁有四項專利、一部書籍和四個書章。他的研究成果已在超過100個會議上發表。他曾教授MEMS/NEMS研討會和機械系統工程課程，指導超過30名研究生。他獲得多項獎項，包括2017年和2020年IEEE-MEMS會議的研究旅行獎、2017年IEEE-Transducers的研究旅行獎、IEEE-NANO和IEEE-NEMS的優秀論文獎、2019年IEEJ的最佳論文獎、2022年越南國立大學科學大學的最佳發表論文獎，以及2022年電氣科學促進獎（台灣IEE，台灣電機電子工程學會）。他目前正在追求一個全方位的微/納米能源系統，包括能量收集、能量儲存和感測，並開發高性能的功能性材料和裝置。他目前的研究興趣包括電容式矽共振器、光調製器件、熱電發電機、氣體感測、微型超電容器、克努森泵、離子傳輸和金屬輔助化學蝕刻。

塔爾洛欽·辛格目前擔任印度賈蘭達爾的Lovely Professional University (LPU)產品與工業設計學院的助理教授，自2022年3月以來一直擔任此職位。在加入LPU之前，他曾是印度孟買印度理工學院（IIT Bombay）的機構博士後研究員。辛格博士於2011年獲得旁遮普技術大學的機械工程學士學位，並以金獎畢業，隨後於2013年在IIT Roorkee獲得生產與工業系統工程的碩士學位。他於2019年在IIT Roorkee完成先進加工工藝的博士學位。他目前的研究重點是先進製造技術，特別是難以加工材料的切削加工和創新微加工工藝的開發。他已發表25篇經過同行評審的期刊文章，擁有兩項專利，並貢獻了一本書和三個書章。辛格博士積極參與開發連續和混合非傳統加工方法，以處理和完成難以加工的陶瓷。此外，他還參與使用聚合物廢料進行產品設計和開發，並探索陶瓷和金屬的表面改性技術，以應用於MEMS和生物醫學裝置。