Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems
暫譯: MEMS 應用的綠色蝕刻技術：可持續的無氟蝕刻方法於微機電系統
Wang, Kaiying
- 出版商: CRC
- 出版日期: 2025-12-19
- 售價: $4,090
- 貴賓價: 9.5 折 $3,886
- 語言: 英文
- 頁數: 122
- 裝訂: Hardcover - also called cloth, retail trade, or trade
- ISBN: 1041144962
- ISBN-13: 9781041144960
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相關分類:
微電子學 Microelectronics
海外代購書籍(需單獨結帳)
相關主題
商品描述
Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS). With growing environmental concerns around traditional MEMS fabrication, this book addresses a critical issue by detailing advanced, eco-friendly alternatives that mitigate environmental impacts without compromising technical performance. Covering a spectrum of innovative etching technologies, from dry and wet chemistries to electrochemical and AI-enhanced hybrid methods, the book offers practical guidance, robust theoretical foundations, and insights from real-world industrial case studies. It is a crucial resource for professionals, researchers, and students dedicated to advancing the sustainability of MEMS fabrication.
Features:
- Thorough analysis of fluorine-free, environmentally friendly MEMS etching alternatives
- Coverage of emerging technologies, including supercritical CO₂, ionic liquids, and gas-phase selective etching
- Exploration of AI-driven process optimization for sustainable and efficient MEMS manufacturing
- Detailed industrial case studies highlighting successful implementation and scalability
- Clear discussions on regulatory drivers, market trends, and future roadmaps for sustainable microfabrication
商品描述(中文翻譯)
《微機電系統應用的綠色蝕刻技術：可持續的無氟蝕刻方法》提供了對微機電系統（MEMS）可持續、無氟蝕刻方法的必要且全面的探討。隨著對傳統MEMS製造的環境關注日益增加，本書針對一個關鍵問題，詳細介紹了先進的環保替代方案，這些方案在不妥協技術性能的情況下減少環境影響。本書涵蓋了一系列創新的蝕刻技術，從乾蝕刻和濕蝕刻化學到電化學和AI增強的混合方法，提供了實用的指導、堅實的理論基礎以及來自真實工業案例研究的見解。這是一本對於致力於推進MEMS製造可持續性的專業人士、研究人員和學生來說至關重要的資源。
特點：
- 對無氟、環保的MEMS蝕刻替代方案進行徹底分析
- 涵蓋新興技術，包括超臨界二氧化碳、離子液體和氣相選擇性蝕刻
- 探討基於AI的過程優化，以實現可持續和高效的MEMS製造
- 詳細的工業案例研究，突顯成功實施和可擴展性
- 清晰討論監管驅動因素、市場趨勢和可持續微製造的未來路線圖
作者簡介
Kaiying Wang received his PhD in condensed matter physics from the Institute of Physics, Chinese Academy of Sciences. He joined the University of South-Eastern Norway (USN) in 2007 as an associate professor and was promoted to professor in 2010. His research interests focus on micro-fabrication and nanotechnology, electrochemistry, photochemistry and nanodevices for environment and energy applications. For teaching, he has taught the Microfabrication (MFA4000, master) and Nanotechnology (TSE3120, bachelor) at the University of South-Eastern Norway since 2010. Meanwhile, he has participated in several national and European projects related to micro/nano fabrication technology. The related education programmes at USN include: (1) Sensor Systems and Innovation (2) Smart Systems Integrated Solutions, and (3) Micro- and Nano Systems Technology.
作者簡介(中文翻譯)
王凱英於中國科學院物理研究所獲得凝聚態物理博士學位。2007年，他加入南東挪威大學（USN）擔任副教授，並於2010年晉升為教授。他的研究興趣集中在微製造與奈米技術、電化學、光化學以及環境與能源應用的奈米裝置。自2010年以來，他在南東挪威大學教授微製造（MFA4000，碩士）和奈米技術（TSE3120，學士）課程。同時，他參與了多個與微/奈米製造技術相關的國家和歐洲項目。USN的相關教育計劃包括：（1）感測系統與創新（2）智慧系統整合解決方案，以及（3）微與奈米系統技術。
