Computational Scaling Technology for Deep Submicron Design（Hardcover）

An understanding of computational scaling technology (CST) is essential for researchers and professionals involved in semiconductor design. The first book to thoroughly explain CST, this work provides ideas and directions for fully integrating design and technology within the field. Focusing on modeling and simulations in computational lithography and design constraint optimization, the book discusses the latest developments in design for manufacturing along with related design methods and challenges. Examples of real-world design-technology co-optimization (DTCO) test cases will help readers master the technology.