Silicon VLSI Technology: Fundamentals, Practice, and Modeling

Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology. For anyone interested in Fabrication Processes.

獨特的方法，這本書提供了一個整合的觀點，關於矽技術，並強調現代電腦模擬。它不僅描述了與矽晶片製造相關的製造實踐，還描述了這些技術的科學基礎。現代CMOS技術。晶體生長，晶圓製造和矽晶圓的基本特性。半導體製造-無塵室，晶圓清潔和擷取。光刻。熱氧化和Si / SiO2界面。摻雜擴散。離子注入。薄膜擴散。蝕刻。後端技術。對於對製造過程感興趣的人。