Measurement Technology for Micro-Nanometer Devices (Hardcover)
暫譯: 微納米裝置的測量技術(精裝版)
Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue
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商品描述
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
• Companion website includes Lab View soft, micro-vision system test software, and algorithm software, enhancing the learning experience
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
• Companion website includes Lab View soft, micro-vision system test software, and algorithm software, enhancing the learning experience
商品描述(中文翻譯)
對於小尺度測量的最先進技術進行全面的檢視
• 突顯來自產業和學術界在微納米裝置測試技術方面的先進研究成果
• 內容涵蓋入門和進階層次,提供基本原理和理論
• 專注於表徵MEMS/NEMS裝置的測量技術
• 附屬網站包含Lab View軟體、微視覺系統測試軟體和演算法軟體,增強學習體驗