System-level Modeling of MEMS (Hardcover)

Filling a gap in the literature, this is the first handbook to simultaneously address the three most important approaches of system-level modeling: physical modeling with lumped elements and Kirchhoffian networks, modal modeling to accurately describe the mechanical domain, and mathematical modeling employing, for example, model order reduction methods.
By adopting this approach, the top editors and authors from industry and research have created a book that will set the standard for years to come. Writing on a clearly understandable and sufficiently detailed level, they familiarize readers with the physical and mathematical underpinnings of MEMS modeling, thus enabling users to choose the most suitable method for their particular application needs.
Perfectly tailored to practitioners and engineers, this reference presents the advantages and pitfalls of each method -- and how to avoid the latter.

填補了文獻中的一個空白，這是第一本同時涵蓋系統級建模的三種最重要方法的手冊：使用集中元件和基爾霍夫網絡進行物理建模，使用模態建模準確描述機械領域，以及使用模型降階方法進行數學建模。通過採用這種方法，來自工業和研究領域的頂級編輯和作者創作了一本將在未來幾年中成為標準的書籍。他們以清晰易懂且足夠詳細的水平撰寫，使讀者熟悉微機電系統建模的物理和數學基礎，從而使用者能夠選擇最適合其特定應用需求的方法。這本參考書完全針對從業人員和工程師，介紹了每種方法的優點和缺點，以及如何避免後者。