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商品描述
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of
MEMS is covered from all angles.
The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first
place, rather than having a hybrid solution.
MEMS is covered from all angles.
The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first
place, rather than having a hybrid solution.
商品描述(中文翻譯)
本版《CMOS-MEMS》最初發表於成功的系列書籍《先進微型與奈米系統》中。在這裡，全球已建立的、價值數十億美元的晶片大規模製造技術CMOS與引人入勝且商業前景可期的新興領域MEMS的結合，從各個角度進行探討。
本書向讀者介紹這一領域，涵蓋從製造技術和材料特性到CMOS-MEMS的實際應用——包括各種微型化的物理、化學和生物傳感器以及射頻系統。關於電路和系統整合問題的重要知識，為這部深入的論著畫上句點，說明了將CMOS與MEMS結合的優勢，而不是採用混合解決方案。
