Practical Guide to RF-MEMS (Paperback)

Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books.

The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical hints given for all RF-MEMS development stages.

• Provides researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts
• Covers all critical steps, dealing with design, simulation, optimization, characterization and fabrication of MEMS for radio-frequency applications
• Addresses frequently disregarded issues, explicitly treating the hard to predict interplay between the three-dimensional device structure and its electromagnetic functionality
• Bridges theory and experiment, fundamental concepts are introduced with the application in mind, and simulation results are validated against experimental results

Appeals to the practice-oriented R&D reader: design and simulation examples are based on widely known software packages such as ANSYS and the hardware description language Verilog.

本書填補了理論性和純實驗性RF-MEMS書籍之間的差距。

從實際角度出發，本書介紹了開發新型RF-MEMS設備概念所需的最關鍵步驟。書籍一開始以參考示例介紹了包含集中元件和複雜網絡的原型RF-MEMS設備，然後從不同角度討論了這些設備的設計、模擬、封裝、測試和後製造建模等方面。必要時引入理論概念以補充所有RF-MEMS開發階段的實用提示。

本書具有以下特點：
- 為研究人員和工程師提供了寶貴的實用提示，以開發新型RF-MEMS設備概念。
- 涵蓋了設計、模擬、優化、特性化和射頻MEMS製造等所有關鍵步驟。
- 處理了常常被忽視的問題，明確處理了三維設備結構與其電磁功能之間難以預測的相互作用。
- 橋接了理論和實驗，基本概念以應用為導向介紹，並將模擬結果與實驗結果進行驗證。

本書適合實踐導向的研發讀者，設計和模擬示例基於廣泛使用的軟件包，如ANSYS和硬件描述語言Verilog。