Micromechanics And Mems: Classic And Seminal Papers To 1990 (a Selected Reprint Volume)


  • 出版商: Wiley
  • 出版日期: 1997-01-15
  • 售價: $10,400
  • 貴賓價: 9.5$9,880
  • 語言: 英文
  • 頁數: 720
  • 裝訂: Paperback
  • ISBN: 0780310853
  • ISBN-13: 9780780310858
  • 海外代購書籍(需單獨結帳)





Electrical Engineering Micromechanics and MEMS Classic and Seminal Papers to 1990 Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, consumer products, genetic engineering, aerospace and microsatellites, communication, the military, data storage, games and toys, food preparation, chemical processing, sensors, and microactuators. In fact, most fields will find uses for micromechanics in the next ten years. Micromechanics and MEMS gives you convenient access to the fundamental papers in this rapidly growing field. Until now, papers written during the earlier stages of this field have been difficult to retrieve. Micromechanics and MEMS presents seminal papers in micromechanics, up to and including papers written in 1990. This volume gives you an historical perspective of the field and insight into where the field is heading. The papers are arranged by topic, with an introduction to each section written by expert and editor, William Trimmer. Topics covered include:

  • Side drive, comb drive, electrostatic, magnetic, and harmonic actuators
  • Valves and pumps
  • Fluidics
  • Surface and bulk micromachining
  • LIGA
  • Computer-aided design
  • Metrology


Table of Contents:

Acknowledgments and Dedication.


Comments on Writing an Article.


There's Plenty of Room at the Bottom (R. Feynman).

Infinitesimal Machinery (R. Feynman).

The Resonant Gate Transistor (H. Nathanson, et al.).

Silicon Micromechanical Devices (J. Angell, et al.).

Anisotropic Etching of Silicon (K. Bean).

Silicon as a Mechanical Materials (K. Petersen).

Microrobots and Micromechanical Systems (W. Trimmer).

Small Machines, Large Opportunities (K. Gabriel, et al.).


IC-Processed Electrostatic Micro-Motors (L.-S. Fan, et al.).

IC-Processed Micro-Motors: Design, Technology, and Testing (Y.-C. Tai, et al.).

Surface-Micromachining Processes for Electrostatic Microactuator Fabrication (T. Lober and R. Howe).

A Study of Three Microfabricated Variable-Capacitance Motors (M. Mehregany, et al.).

Friction and Wear in Microfabricated Harmonic Side-Drive Motors (M. Mehregany, et al.).

Measurements of Electric Micromotor Dynamics (S. Bart, et al.).


Laterally Driven Polysilicon Resonant Microstructures (W. Tang, et al.).

Electrostatic-Comb Drive of Lateral Polysilicon Resonators (W. Tang, et al.).

Electrostatically Balanced Comb Drive for Controlled Levitation (W. Tang, et al.).

Polysilicon Microgripper (C.-J. Kim, et al.).


The Principle of an Electrostatic Linear Actuator Manufactured by Silicon Micromachining (H. Fujita and A. Omodaka).

Design Considerations for a Practical Electrostatic Micro-Motor (W. Trimmer and K. Gabriel).

SCOFSS: A Small Cantilevered Optical Fiber Servo System (J. Wood, et al.).

Microactuators for Aligning Optical Fibers (R. Jebens, et al.).

Large Displacement Linear Actuator (R. Brennen, et al.).

Multi-Layered Electrostatic Film Actuator (S. Egawa and T. Higuchi).

Movable Micromachined Silicon Plates With Integrated Position Sensing (M. Allen, et al.).

Micro Electro Static Actuator With Three Degrees of Freedom (T. Fukuda and T. Tanaka).

The Modelling of Electrostatic Forces in Small Electrostatic Actuators (R. Price. et al.).

Silicon Electrostatic Motors (W. Trimmer, et al.).

Electrostatic Actuators for Micromechatronics (H. Fujita and A. Omodaka).

Electric Micromotors: Electromechanical Characteristics (J. Lang, et al.).

Electroquasistatic Induction Micromotors (S. Bart and J. Lang)

A Perturbation Method for Calculating the Capacitance of Electrostatic Motors (S. Kumar and D. Cho)


Magnetically Levitated Micro-Machines (R. Pelrine and I. Busch-Vishniac).

Fabrication and Testing of a Micro Superconducting Actuator Using the Meissner Effect (Y.-K. Kim, et al.).

Room Temperature, Open-Loop Levitation of Microdevices Using Diamagnetic Materials (R. Pelrine).


An Operational Harmonic Electrostatic Motor (W. Trimmer and R. Jebens).

The Wobble Motor: An Electrostatic Planetary-Armature, Microactuator (S. Jacobsen, et al.).

An Electrostatic Top Motor and Its Characteristics (M. Sakata, et al.).

Operation of Microfabricated Harmonic and Ordinary Side-Drive Motors (M. Mehregany, et al.).



Micromechanical Silicon Actuators Based on Thermal Expansion Effects (W. Riethmüller, et al.).

CMOS Electrothermal Microactuators (M. Parameswaran, et al.).

Electrically-Activated, Micromachined Diaphragm Valves (H. Jerman).

Study on Micro Engines—Miniaturizing Stirling Engines for Actuators and Heatpumps (N. Nakajima, et al.).

Shape Memory Alloy.

A Micro Rotary Actuator Using Shape Memory Alloys (K. Gabriel, et al.).

Millimeter Size Joint Actuator Using Shape Memory Alloy (K. Kuribayashi).

Reversible SMA Actuator for Micron Sized Robot (K. Kuribayashi & M. Yoshitake).

Characteristics of Thin-Wire Shape Memory Actuators (P. Neukomm, et al.).

Shape Memory Alloy Microactuators (M. Bergamasco, et al.).


Micro Actuators Using Recoil of an Ejected Mass (T. Higuchi, et al.).

Precise Positioning Mechanism Utilizing Rapid Deformations of Piezoelectric Elements (T. Higuchi, et al.).

Tiny Silent Linear Cybernetic Actuator Driven by Piezoelectric Device With Electromagnetic Clamp (K. Ikuta, et al.).

Experimental Model and IC-Process Design of a Nanometer Linear Piezoelectric Stepper Motor (J. Judy, et al.).


Zinc-Oxide Thin Films for Integrated-Sensor Applications (D. Polla & R. Muller).

A Micromachined Manipulator for Submicron Positioning of Optical Fibers (A. Feury, et al.).

Ultrasonic Micromotors: Physics and Applications (R. Moroney, et al.).


A Microminiature Electric-to-Fluidic Valve (M. Zdeblick & J. Angell).

The Fabrication of Integrated Mass Flow Controllers (M. Esashi, et al.).

Normally Close Microvalve and Micropump Fabricated on a Silicon Wafer (M. Esashi, et al.).

A Thermopneumatic Micropump Based on Micro-Engineering Techniques (F. Van de Pol, et al.).

Variable-Flow Micro-Valve Structure Fabricated with Silicon Fusion Bonding (F. Pourahmadi, et al.).

A Pressure-Balanced Electrostatically-Actuated Microvalve (M. Huff, et al.).

Micromachined Silicon Microvalve (T. Ohnstein, et al.).


Microminiature Fluidic Amplifier (M. Zdeblick, et al.).

A Planar Air Levitated Electrostatic Actuator System (K. Pister, et al.).

Liquid and Gas Transport in Small Channels (J. Pfahler, et al.).

Squeeze-Film Damping in Solid-State Accelerometers (J. Starr).

A Micromachined Floating-Element Shear Sensor (M. Schmidt, et al.).

A Multi-Element Monolithic Mass Flowmeter with On-Chip CMOS Readout Electronics (E. Yoon & K. Wise).

Environmentally Rugged, Wide Dynamic Range Microstructure Airflow Sensor (T. Ohnstein, et al.).


Polycrystalline Silicon Micromechanical Beams (R. Howe & R. Muller).

Integrate Fabrication of Polysilicon Mechanisms (M. Mehregany, et al.).

Integrated Movable MicroMechanical Structures for Sensors and Actuators (L.-S. Fan, et al.).

Polysilicon Microbridge Fabrication Using Standard CMOS Technology (M. Parameswaran, et al.).

Process Integration for Active Polysilicon Resonant Microstructures (M. Putty, et al.).

Fabrication of Micromechanical Devices From Polysilicon Films With Smooth Surfaces (H. Guckel, et al.).

Selective Chemical Vapor Deposition of Tungsten for Microelectromechanical Structures (N. MacDonald, et al.).


Fabrication of Hemispherical Structures Using Semiconductor Technology for Use in Thermonuclear Fusion Research (K. Wise, et al.).

Micromachining of Silicon Mechanical Structures (G. Kaminsky).

Strings, Loops, and Pyramids—Building Blocks for Microstructrures (H. Busta, et al.).

Corner Compensation Structures for (110) Oriented Silicon (D. Ciarlo).

A Study on Compensating Corner Undercutting in Anisotropic Etching of (100) Silicon (X.-P. Wu & W. Ko).

A New Silicon-on-Glass Process for Integrated Sensors (L. Spangler and K. Wise).

Mechanisms of Anodic Bonding of Silicon to Pyrex Glass (K. Albaugh, et al.).

Silicon Fusion Bonding for Pressure Sensors (K. Petersen, et al.).

Low-Temperature Silicon-to-silicon Anodic Bonding With Intermediate Low Melting Point Glass (M. Esashi, et al.).

Fusing Silicon Wafers With Low Melting Temperature Glass (L. Field & R. Muller).

Silicon Fusion Bonding for Fabrication of Sensors, Actuators and Microstructures (P. Barth).

Scaling and Dielectric Stress Compensation of Ultrasensitive Boron-Doped Silicon Microstructures (S. Cho, et al.).

Field Oxide Microbridges, Cantilever Beams, Coils and Suspended Membranes in SACMOS Technology (D. Moser, et al.).

Micromachining of Quartz and its Application to an Acceleration Sensor (J. Daniel, et al.).


Fabrication of Microstructures using the LIGA Process (W. Ehrfeld, et al.).

Deep X-Ray and UV Lithographies for Micromechanics (H. Guckel, et al.).


OYSTER, a 3D Structural Simulator for Micro Electromechanical Design (G. Koppelman).

A CAD Architecture for Microelectromechanical Systems (F. Maseeh, et al.).

CAEMEMS: An Integrated Computer-Aided Engineering Workbench for Micro-Electro-Mechanical Systems (S. Crary and Y. Zhang).

CAD for Silicon Anistropic Etching (R. Buser and N. de Rooij).


Can We Design Microbotic Devices Without Knowing the Mechanical Properties of Materials? (S. Senturia).

The Use of Micromachined Structure for the Measurement of Mechanical Properties and Adhesion of Thin Films (M. Mehregany, et al.).

Mechanical Property Measurement of Thin Films Using Load-Deflection of Composite Rectangular Membrane (O. Tabata, et al.).

Fracture Toughness Characterization of Brittle Thin Films (L. Fan, et al.).

Spiral Microstructures for the Measurement of Average Strain Gradients in Thin Films (L.-S. Fan, et al.).

Polysilicon Microstructures to Characterize Static Friction (M. Lim, et al.).

Study of the Dynamic Force/Acceleration Measurement (A. Umeda and K. Ueda).

Anomalous Emissivity from Periodic Micro Machined Silicon Surfaces (P. Hesketh, et al.).

Author Index.

Subject Index.

About the Author.

Editor's Notes on the Second Printing.


- 側驅動、梳狀驅動、靜電、磁性和諧振致動器
- 閥門和泵
- 流體力學
- 表面和體積微加工
- 電腦輔助設計
- 測量技術

- 致謝和獻辭
- 簡介
- 撰寫文章的評論
- 微機械學的早期論文
- 微機械學的空間充足(R. 費曼)
- 微小機械(R. 費曼)
- 諧振閘極電晶體(H. 納森森等)
- 矽微機械設備(J. 安吉爾等)
- 矽的異向性蝕刻(K. 比恩)
- 矽作為機械材料(K. 彼得森)
- 微機器人和微機械系統(W. 特里默)
- 小型機器,巨大機遇(K. 加布里埃爾等)
- 側驅動致動器
- 集成電路加工的靜電微馬達(L.-S. 范等)
- 集成電路加工的微馬達:設計、技術和測試(Y.-C. 戴等)
- 用於靜電微致動器製造的表面微加工工藝(T. 洛伯和R. 霍威)
- 三種微加工可變電容馬達的研究(M. 梅赫雷甘尼等)
- 微加工諧振側驅動馬達的摩擦和磨損(M. 梅赫雷甘尼等)
- 電動微馬達動力學的測量(S. 巴特等)
- 梳狀驅動致動器
- 側向驅動的多晶矽諧振微結構(W. 唐等)
- 側向多晶矽諧振器的靜電梳狀驅動(W. 唐等)
- 靜電平衡梳狀驅動控制懸浮(W. 唐等)
- 多晶矽微夾具(C.-J. 金等)
- 靜電致動器
- 矽微加工製造的靜電線性致動器原理(H. 藤田和A. 小田崎)
- 實用靜電微馬達的設計考慮(W. 特里默和K. 加布里埃爾)
- SCOFSS:一個小型懸臂光纖伺服系統(J. 伍德等)
- 用於對齊光纖的微致動器(R. 耶本斯等)
- 大位移線性致動器(R. 布倫南等)
- 多層靜電薄膜致動器(S. 江川和T. 樋口)
- 帶有集成位置感測的可移動矽微加工板