Photoresist Technology in Microsystems: Principles, Processes and Applications
暫譯: 微系統中的光阻技術：原理、流程與應用
Wang, Kaiying
- 出版商: Springer
- 出版日期: 2025-10-15
- 售價: $7,480
- 貴賓價: 9.5 折 $7,106
- 語言: 英文
- 頁數: 183
- 裝訂: Hardcover - also called cloth, retail trade, or trade
- ISBN: 9819516056
- ISBN-13: 9789819516056
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相關分類:
微電子學 Microelectronics
海外代購書籍(需單獨結帳)
相關主題
商品描述
This book presents a comprehensive overview of recent advances in photoresist technology, a cornerstone of modern microfabrication. Photoresists enable the precise patterning essential for creating microelectronic devices, MEMS, biomedical systems, and photonic components. As the demand for smaller, faster, and more efficient microsystems grows, the role of photoresists in achieving high-resolution patterning and complex 3D structures has become increasingly critical. However, despite its importance, there is a lack of comprehensive resources that bridge the gap between the fundamental principles of photoresist chemistry, advanced fabrication techniques, and their diverse applications. This book addresses this gap by providing a unified and up to-date exploration of photoresist technology, making it a timely and essential contribution to the field. The book balances theoretical depth with practical insights, making it accessible to readers with varying levels of expertise. The book is designed to cater to a broad audience, from students and researchers to industry professionals. A unique feature of this book is its emphasis on the interplay between material properties, processing techniques, and application-specific requirements.
商品描述(中文翻譯)
本書提供了近期光刻膠技術進展的全面概述，這是現代微製造的基石。光刻膠使得精確的圖案化成為可能，這對於創建微電子設備、微機電系統（MEMS）、生物醫學系統和光子元件至關重要。隨著對更小、更快和更高效的微系統需求的增長，光刻膠在實現高解析度圖案化和複雜三維結構中的角色變得越來越重要。然而，儘管其重要性，卻缺乏全面的資源來彌補光刻膠化學的基本原理、高級製造技術及其多樣化應用之間的差距。本書通過提供統一且最新的光刻膠技術探索來填補這一空白，使其成為該領域及時且必要的貢獻。本書在理論深度與實用見解之間取得平衡，使其對不同專業水平的讀者都能夠理解。本書旨在滿足廣泛的讀者群體，從學生和研究人員到行業專業人士。本書的一個獨特特點是強調材料特性、處理技術和應用特定需求之間的相互作用。
作者簡介
Prof. Kaiying Wang received his PhD in condensed matter physics from the Institute of Physics, Chinese Academy of Sciences. He joined University of South-Eastern Norway (USN) in 2007 as an associate professor and was promoted to professor in 2010. His research interests focus on micro-fabrication and nanotechnology, electrochemistry, photochemistry and nanodevices for environment and energy applications.
For teaching, he has taught the microfabrication (MFA4000, master) and Nanotechnology (TSE3120, bachelor) at University of South-eastern Norway from year 2010. Meanwhile, he has participated in several national and European projects related to the micro/nano fabrication technology. The related education programmes at USN include: (1) Sensor Systems and Innovation (2) Smart Systems Integrated Solutions (3) Micro- and Nano Systems Technology.
作者簡介(中文翻譯)
教授王凱英於中國科學院物理研究所獲得凝聚態物理博士學位。2007年，他加入南東挪威大學（University of South-Eastern Norway, USN）擔任副教授，並於2010年晉升為教授。他的研究興趣集中在微製造與奈米技術、電化學、光化學以及環境與能源應用的奈米裝置。
在教學方面，自2010年以來，他在南東挪威大學教授微製造（MFA4000，碩士）和奈米技術（TSE3120，學士）。同時，他參與了多個與微/奈米製造技術相關的國家和歐洲項目。USN的相關教育計劃包括：（1）感測系統與創新（2）智慧系統整合解決方案（3）微型與奈米系統技術。
