Fundamental Principles of Optical Lithography: The Science of Microfabrication (Paperback)

Chris Mack

買這商品的人也買了...

商品描述

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components.

By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.

This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.

Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

商品描述(中文翻譯)

製造集成電路需要在半導體基板上進行各種物理和化學過程。一般來說,這些過程可以分為三個類別:薄膜沉積、圖案製作和半導體摻雜。導體和絕緣體的薄膜用於連接和隔離晶體管及其組件。

通過創建這些不同組件的結構,可以建造和連接數百萬個晶體管,形成現代微電子設備的複雜電路。所有這些過程的基礎是光刻術,即在基板上形成三維浮雕圖像,以便將圖案轉移到基板上。

本書為學生和研究人員提供了完整的理論和實踐處理光刻術的主題。它包括十個詳細的章節,以及每個章節結尾提供的三個附錄和問題。

附加資訊:
訪問http://www.lithoguru.com/textbook/index.html可以增強讀者的理解,該網站提供了如何下載免費的實驗室手冊《使用MATLAB®進行光刻術建模》以配合教科書的資訊。您還可以聯繫作者並獲得教師的幫助。