Technology of Integrated Circuits (Springer Series in Advanced Microelectronics)
D. Widmann, H. Mader, H. Friedrich
- 出版商: Springer
- 出版日期: 2000-08-17
- 售價: $940
- 貴賓價: 9.5 折 $893
- 語言: 英文
- 頁數: 342
- 裝訂: Hardcover
- ISBN: 3540661999
- ISBN-13: 9783540661993
Strongly involved with SIEMENS Corp. in the tremendous
recent developments of process technologies for IC fabrication the authors
comprehensively record their authoritative knowledge and practical experience.
New materials , modern planar technology, process designs for CMOS, Bipolar,
BICMOS and smart-power technologies, self-adjusting doping techniques are just a
few of the highlights. With its strong application-orientation this is a
need-to-have book for professionals in semiconductor industries. Senior students
in electrical engineering and physics can use it as a textbook because of the
systematic treatment of the subjects. With regard to their later careers as
industrial engineers they will particularly appreciate the deep insight into the
actual methods and problems of IC manufacturing.
TABLE OF CONTENTS
- Basic Principles of Integrated Circuit Technology.
- Film Technology.
- Etching Technology.
- Doping Technology.
- Cleaning Technology.
- Process Integration